Published in
American Chemical Society, Journal of Physical Chemistry C, 50(124), p. 27829-27839, 2020
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Reaction Pathways for Atomic Layer Deposition with Lithium Hexamethyl Disilazide, Trimethyl Phosphate, and Oxygen Plasma
Journal article published in 2020 by
Andreas Werbrouck 
,
Felix Mattelaer ,
Matthias Minjauw ,
Mikko Nisula ,
Jaakko Julin ,
Frans Munnik,
Jolien Dendooven ,
Christophe Detavernier
,
Felix Mattelaer ,
Matthias Minjauw ,
Mikko Nisula ,
Jaakko Julin ,
Frans Munnik,
Jolien Dendooven ,
Christophe Detavernier
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Preprint: archiving allowed
- Must obtain written permission from Editor
- Must not violate ACS ethical Guidelines
Postprint:
archiving restricted
- Must obtain written permission from Editor
- Must not violate ACS ethical Guidelines
Published version:
archiving forbidden
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