Published in
2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), 2020
DOI: 10.1109/ipfa49335.2020.9260748
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Defect and Contamination Analysis Necessity with Multiple Surface Analytical Techniques
Proceedings article published in 2020 by
Lei Zhu,
Caryn Sek,
Jun Xian Goh,
Yeh Yee Kee,
Jing Fang Pan,
Yanfei Zhao,
Younan Hua,
Xiaomin Li
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