Published in

Optica, Optics Express, 26(28), p. 38480, 2020

DOI: 10.1364/oe.408921

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Enhancing the dynamic range of deformable mirror with compression bias

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design principles for this class of actuator are described and a mirror with 370 mD dynamic range is demonstrated.