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Published in

Springer Nature [academic journals on nature.com], Microsystems and Nanoengineering, 1(6), 2020

DOI: 10.1038/s41378-020-00212-3

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Sensitive capacitive pressure sensors based on graphene membrane arrays

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

AbstractThe high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to $47.8$ 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.