Dissemin is shutting down on January 1st, 2025

Published in

IOP Publishing, Smart Materials and Structures, 11(29), p. 115039, 2020

DOI: 10.1088/1361-665x/abb4b9

Links

Tools

Export citation

Search in Google Scholar

A unified approach for the calculation of in-plane dielectric constant of films with interdigitated electrodes

Journal article published in 2020 by Trygve M. Reader ORCID, Ulrik Hanke ORCID, Einar Halvorsen ORCID, Tor Grande ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

Full text: Unavailable

Green circle
Preprint: archiving allowed
Orange circle
Postprint: archiving restricted
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Abstract Interdigitated electrodes (IDEs) on dielectric films is an important electrode design in electrical components such as transducers and sensors. Further development and use of IDEs for characterization of the in-plane properties of dielectric films requires models for the capacitance, particularly when used in a multilayer stack. Previous models for the capacitance have permitted erroneous boundary conditions between layers with associated limitations to accuracy. In this work we present a new model based on fulfilling the boundary conditions between layers with different dielectric constant. We further demonstrate how the model can be used to calculate the in-plane dielectric constant and polarization of BaTiO3 films. The model is shown to outperform previous models using both the experimental data from BaTiO3 films on SrTiO3 substrates and finite element method simulations of the corresponding case. One important advantage compared to previous work is that the new model provides good results regardless of film thickness.