Published in
IOP Publishing, Journal of Physics D: Applied Physics, 3(54), p. 035102, 2020
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Influence of Oxygen Source on the Ferroelectric Properties of ALD Grown Hf1-xZrxO2 Films
Journal article published in 2020 by
Ruben Alcala 
,
Claudia Richter,
Monica Materano,
Patrick D. Lomenzo,
Chuanzhen Zhou,
Jacob L. Jones ,
Thomas Mikolajick,
Uwe Schroeder
,
Claudia Richter,
Monica Materano,
Patrick D. Lomenzo,
Chuanzhen Zhou,
Jacob L. Jones ,
Thomas Mikolajick,
Uwe Schroeder
This paper is made freely available by the publisher.
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