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The Electrochemical Society, ECS Journal of Solid State Science and Technology, 10(9), p. 104009, 2020

DOI: 10.1149/2162-8777/abbb71

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Metal Capping Layer Effects on Electromigration Failure Phenomena of Plasma Etched Copper Lines

Journal article published in 2020 by Jia Quan Su ORCID, Mingqian Li ORCID, Yue Kuo ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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