Successful deposition of CsPbX3 (X = Br, Cl) thin films (50-500 nm) on several kind of substrates has been realized by Radio-Frequency Magnetron Sputtering. The technique allows for high homogeneity of the samples on large areas (several cm2) not only in terms of morphology but also referring to the optical properties. In particular, high resolution (in space, spectrum and time) photoluminescence studies in a wide temperature range (10-300 K) reveal that the low inhomogeneous broadening comes from a submicron size disorder while no significant contribution arises from a micrometric or even larger disorder. Given the relevance of inorganic halide perovskites for innovative optoelectronic devices, our results prove the scalability of this technique. Moreover, the successful deposition on several different substrates open the route for an easy integration in multi-layered structures.