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American Institute of Physics, APL Materials, 8(8), p. 081104, 2020

DOI: 10.1063/5.0013965

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Cation diffusion in polycrystalline thin films of monoclinic HfO2 deposited by atomic layer deposition

Journal article published in 2020 by Michael P. Mueller ORCID, Katrin Pingen, Alexander Hardtdegen ORCID, Stephan Aussen ORCID, Andreas Kindsmueller, Susanne Hoffmann-Eifert ORCID, Roger A. De Souza ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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