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Royal Society of Chemistry, RSC Advances, 47(10), p. 27932-27939, 2020

DOI: 10.1039/d0ra05104g

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Chemical bonding of nitrogen formed by nitridation of crystalline and amorphous aluminum oxide studied by X-ray photoelectron spectroscopy

Journal article published in 2020 by K. Lawniczak-Jablonska ORCID, Z. R. Zytkiewicz ORCID, S. Gieraltowska, M. Sobanska ORCID, P. Kuzmiuk, K. Klosek
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

XPS spectra and chemical states of nitrogen in N-plasma treated crystalline sapphire (left) and amorphous a-AlOx layer on Si (right).