Published in
American Institute of Physics, APL Materials, 7(8), p. 071101, 2020
DOI: 10.1063/5.0011331
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A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
Journal article published in 2020 by
Tai Nguyen 
,
Noureddine Adjeroud,
Sebastjan Glinsek ,
Yves Fleming,
Jérôme Guillot ,
Patrick Grysan ,
Jérôme Polesel-Maris
,
Noureddine Adjeroud,
Sebastjan Glinsek ,
Yves Fleming,
Jérôme Guillot ,
Patrick Grysan ,
Jérôme Polesel-Maris
This paper is made freely available by the publisher.
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