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Published in

Royal Society of Chemistry, RSC Advances, 34(10), p. 19936-19942, 2020

DOI: 10.1039/d0ra02567d

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Epitaxial and large area Sb2Te3 thin films on silicon by MOCVD

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Highly oriented antimony telluride thin films are prepared by room temperature metalorganic chemical vapor deposition on Si(111).