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ECS Meeting Abstracts, 12(MA2019-01), p. 837-837, 2019

DOI: 10.1149/ma2019-01/12/837

ECS Meeting Abstracts, 24(MA2019-02), p. 1149-1149, 2019

DOI: 10.1149/ma2019-02/24/1149

ECS Meeting Abstracts, 10(MA2020-01), p. 837-837, 2020

DOI: 10.1149/ma2020-0110837mtgabs

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Molybdenum Disulfides and Diselenides By Atomic Layer Deposition

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

The success of graphene opened a door for a new class of chalcogenide materials with unique properties that can be applied in the semiconductor technology [1]. Monolayers of two-dimensional transition metal dichalcogenides (2D TMDCs) possess a direct band gap [2] that is crucial for optoelectronic applications. Additionally, the direct band gap can be easily tuned by either chemical composition or external stimuli. Next to the optoelectronic applications, where a monolayer planar structure is necessary to employ, a layer of standing flakes, which possesses a large surface area, can be used for hydrogen evolution [3] a photodegradation of organic dyes [4] or as electrodes in Li ion batteries [5]. In principle, TMDCs can be prepared by various top-down (e.g. exfoliation) and bottom-up techniques, such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) growth techniques [1]. MoS2, a typical representative of TMDCs, has been widely studied for many applications. Recently, the possibility to employ ALD as a technique to grow MoS2 has been reported. In these works (CH3)2S2 [6] or H2S [7, 8] were used as the S precursor and Mo(CO)6 [6], MoCl5 [7] or Mo(thd)3 [8] as the Mo precursors. From the practical point of view, MoSe2 is even more interesting than MoS2 since MoSe2 possesses a higher electrical conductivity than MoS2 [9, 10]. Recently, we have shown that ALD deposition of MoSe2 [11] or Mo-O-Se [12] using ((CH3)3Si)2Se as the Se precursor and the MoCl5 or Mo(CO)6, respectively, as the Mo precursors is feasible. The presentation will focus on the synthesis of MoS2 and MoSe2 by ALD, their characterization and applications in various fields. Experimental details and some recent photocatalytic and hydrogen evolution results will be presented and discussed. References: [1] A. V. Kolobov, J. Tominaga, Two-Dimensional Transition-Metal, Dichalcogenides. Springer Series in Materials Science, Springer International Publishing AG, Switzerland 2016 [2] B. Radisavljevic, A. Radenovic, J. Brivio, V. Giacometti, A. Kis, Nat. Nanotechnol. 2011, 6, 147. [3] L. Wang, Z. Sofer, J. Luxa, M. Pumera, Adv. Mater. Interfaces 2015, 2, 1500041 [4] Y. Wu, M. Xu, X. Chen, S. Yang, H. Wu, J. Pan, X. Xiong, Nanoscale 2016, 8, 440 [5] D. Ilic, K. Wiesener, W. Schneider, H. Oppermann, G. Krabbes, J.Power Sources 1985, 14, 223 [6] Z. Jin, S.Shin,D.H.Kwon, S. J.Han,Y. S.Min,Nanoscale 2014, 6, 14453. [7] L. K. Tan, B. Liu, J. H. Teng, S. Guo, H. Y. Low, K. P. Loh, Nanoscale 2014, 6, 10584 [8] M. Mattinen et al., Adv. Mater. Interfaces 2017, 4, 1700123. [9] D. Kong, H. Wang, J. J. Cha, M. Pasta, K. J. Koski, J. Yao, Y. Cui, Nano Lett. 2013, 13, 1341. [10] A. Eftekhari, Appl. Mater. Today 2017, 8. [11] M. Krbal et al., Phys. Stat. Sol. RRL, 2018, 12, 1800023 [12] S. Ng et al., Adv. Mater. Interfaces 2017, 1701146.