Published in
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020
DOI: 10.1109/mems46641.2020.9056271
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Epitaxial Single-Crystal ScAlN on 4H-SiC for High-Velocity, Low-Loss SAW Devices
Proceedings article published in 2020 by
Vikrant J. Gokhale 
,
Brian P. Downey,
Matthew T. Hardy,
Eric N. Jin ,
Jason A. Roussos,
David J. Meyer
,
Brian P. Downey,
Matthew T. Hardy,
Eric N. Jin ,
Jason A. Roussos,
David J. Meyer
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