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IOP Publishing, Applied Physics Express, 6(13), p. 065509, 2020

DOI: 10.35848/1882-0786/ab916a

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Control of phase purity in high scandium fraction heteroepitaxial ScAlN grown by molecular beam epitaxy

Journal article published in 2020 by Matthew T. Hardy ORCID, Eric N. Jin ORCID, Neeraj Nepal ORCID, Douglas Scott Katzer ORCID, Brian P. Downey ORCID, Vikrant J. Gokhale ORCID, David F. Storm ORCID, David J. Meyer ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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