Published in
IOP Publishing, Plasma Sources Science and Technology, 6(29), p. 065003, 2020
Links
Tools
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude
Journal article published in 2020 by
Tomas Kozak 
,
Andrea Dagmar Pajdarová ,
Martin Čada ,
Martin Cada,
Zdenek Hubicka,
Pavel Mareš ,
Jiří Čapek,
Jiri Capek
,
Andrea Dagmar Pajdarová ,
Martin Čada ,
Martin Cada,
Zdenek Hubicka,
Pavel Mareš ,
Jiří Čapek,
Jiri Capek
This paper is made freely available by the publisher.
Full text: Download
Published version:
archiving forbidden
Data provided by 