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American Chemical Society, Chemistry of Materials, 1(32), p. 315-325, 2019

DOI: 10.1021/acs.chemmater.9b03826

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Mechanistic Study of Nucleation Enhancement in Atomic Layer Deposition by Pretreatment with Small Organometallic Molecules

Journal article published in 2019 by Camila de Paula ORCID, Nathaniel E. Richey ORCID, Li Zeng ORCID, Stacey F. Bent ORCID
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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