Published in
The Electrochemical Society, ECS Journal of Solid State Science and Technology, 4(9), p. 044001, 2020
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Controlling the Cerium Oxidation State During Silicon Oxide CMP to Improve Material Removal Rate and Roughness
Journal article published in 2020 by
C. M. Netzband 
,
K. Dunn
,
K. Dunn
This paper was not found in any repository, but could be made available legally by the author.
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