Published in
Royal Society of Chemistry, RSC Advances, 23(10), p. 13737-13748, 2020
DOI: 10.1039/d0ra02558e
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Tantalum(v) 1,3-propanediolate β-diketonate solution as a precursor to sol–gel derived, metal oxide thin films
Journal article published in 2020 by
Christopher Beale 
,
Stefanie Hamacher ,
Alexey Yakushenko ,
Oumaima Bensaid,
Sabine Willbold,
Guillermo Beltramo ,
Sören Möller ,
Heinrich Hartmann,
Elmar Neumann,
Gregor Mussler,
Alexander Shkurmanov,
Dirk Mayer ,
Bernhard Wolfrum,
Andreas Offenhäusser
,
Stefanie Hamacher ,
Alexey Yakushenko ,
Oumaima Bensaid,
Sabine Willbold,
Guillermo Beltramo ,
Sören Möller ,
Heinrich Hartmann,
Elmar Neumann,
Gregor Mussler,
Alexander Shkurmanov,
Dirk Mayer ,
Bernhard Wolfrum,
Andreas Offenhäusser
This paper is made freely available by the publisher.
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Abstract
Synthesis of tantalum(v) 1,3-propanediolate β-diketonate solution and use in photochemical solution deposition to form tantalum oxide films.