Published in
2019 IEEE International Electron Devices Meeting (IEDM), 2019
DOI: 10.1109/iedm19573.2019.8993485
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Demonstration of BEOL-compatible ferroelectric Hf0.5Zr0.5O2 scaled FeRAM co-integrated with 130nm CMOS for embedded NVM applications
Proceedings article published in 2019 by
T. Francois 
,
C. Pellissier,
S. Slesazeck,
V. Havel,
C. Richter,
A. Makosiej,
B. Giraud,
E. T. Breyer,
M. Materano,
P. Chiquet,
M. Bocquet,
L. Grenouillet,
E. Nowak,
U. Schroeder,
F. Gaillard
and other authors.
,
C. Pellissier,
S. Slesazeck,
V. Havel,
C. Richter,
A. Makosiej,
B. Giraud,
E. T. Breyer,
M. Materano,
P. Chiquet,
M. Bocquet,
L. Grenouillet,
E. Nowak,
U. Schroeder,
F. Gaillard
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
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