Published in

Optica, Optics Letters, 7(45), p. 1862, 2020

DOI: 10.1364/ol.386861

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UV–NIR femtosecond laser hybrid lithography for efficient printing of complex on-chip waveguides

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We propose UV–IR femtosecond laser hybrid lithography for the efficient printing of complex on-chip waveguides, which offers good performance in terms of processing efficiency and accuracy. With this three-dimensional printing technology, waveguides with complex cross-section shapes, such as owls and kittens, can be easily fabricated with an efficiency increased by 1500% (for 6 µ m × 6 µ m ). In addition, a circular cross-section waveguide with an extremely low birefringence and complex 8 × 8 random walk networks were quickly customized, which implies that in the design and preparation of the large-scale optical chips, the proposed maskless method allows for the preparation of highly customized devices.