AbstractWith the discovery of bulk metallic glasses (BMGs), there has been considerable interest in understanding their mechanical behavior. In spite of these previous observations on the relation between plastic deformation of metallic glasses and their diffusion behavior, a detailed understanding on the diffusion of BMGs is still unexplored. We evaluated the contribution of deformation-induced structural transformations (elastic, anelastic, viscoplastic or viscoelastic responsive and plastic strain) on the diffusion of Zr-based bulk metallic glasses in as-cast, elastostatically stressed and plastically deformed states. Experimental investigations of the diffusion process and the elemental distributions in the glassy alloy were performed following plastic deformation by multiple cold rolling and elastostatic cyclic compression, respectively. We compared the vacancy model and the transition state model to verify the diffusion mechanism in the deformed bulk metallic glass. The diffusion of tracer atoms, i.e., Fe, in the bulk metallic glass is affected by viscoelastic responsive strain governing the transition-state model. In contrast, the diffusion of constituent atoms, i.e., Ti, Zr, in the bulk metallic glass is dominantly affected by plastic strain governing the vacancy model. The results reveal that the diffusion behavior of bulk glassy alloys can be changed by variation of the constituent elements and applying different strain modes upon deformation.