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β-SiC buried layer formed by CH4 + Ar plasma implantation

Journal article published in 2005 by Y.-M. Xing, Y.-H. Yu, K.-W. Chen ORCID, Z.-H. Zheng, W.-W. Yang
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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