Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 2(38), p. 022408, 2020
DOI: 10.1116/1.5134743
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Atomic layer deposition of Nb-doped TiO2: Dopant incorporation and effect of annealing
Journal article published in 2020 by
Wilhelmus J. H. (Willem-Jan) Berghuis 
,
Jimmy Melskens ,
Bart Macco ,
Saravana Balaji Basuvalingam ,
Marcel A. Verheijen ,
Wilhelmus M. M. (Erwin) Kessels
,
Jimmy Melskens ,
Bart Macco ,
Saravana Balaji Basuvalingam ,
Marcel A. Verheijen ,
Wilhelmus M. M. (Erwin) Kessels
This paper was not found in any repository, but could be made available legally by the author.
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