Published in
Institute of Electrical and Electronics Engineers, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 10(66), p. 1606-1615, 2019
DOI: 10.1109/tuffc.2019.2926211
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Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation
Journal article published in 2019 by
Christopher Y. Cheng 
,
Ajay Dangi ,
Liqiang Ren ,
Sudhanshu Tiwari ,
Robert R. Benoit ,
Sri-Rajasekhar Kothapalli,
Yongqiang Qiu ,
Holly S. Lay ,
Thomas E. Mallouk,
Sumit Agrawal ,
Sandy Cochran ,
Rudra Pratap,
Susan Trolier-Mckinstry
,
Ajay Dangi ,
Liqiang Ren ,
Sudhanshu Tiwari ,
Robert R. Benoit ,
Sri-Rajasekhar Kothapalli,
Yongqiang Qiu ,
Holly S. Lay ,
Thomas E. Mallouk,
Sumit Agrawal ,
Sandy Cochran ,
Rudra Pratap,
Susan Trolier-Mckinstry
This paper is made freely available by the publisher.
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