First Demonstration of CMOS Inverter and 6T-SRAM Based on GAA CFETs Structure for 3D-IC Applications

Chang, S.-W.; Li, J.-H.; Huang, M.-K.; Huang, Y.-C.; Huang, S.-T.; Wang, H.-C.; Huang, Y.-J.; Wang, J.-Y.; Yu, L.-W.; Huang, Y.-F.; Hsueh, F.-K.; Sung, P.-J.; Wu, C.-T.; Ma, W. C.-Y.; Kao, K.-H.; Lee, Y.-J.; Lin, C.-L.; Chuang, R. W.; Huang, K.-P.; Samukawa, S.; Li, Y.; Lee, W.-H.; Chu, T.-Y.; Chao, T.-S.; Huang, G.-W.; Wu, W.-F.; Li, J.-Y.; Shieh, J.-M.; Yeh, W.-K.; Wang, Y.-H.; Lu, D. D.; Wang, C.-J.; Lin, N.-C.; Su, C.-J.; Lo, S.-H.; Huang, H.-F.

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2019 IEEE International Electron Devices Meeting (IEDM), 2019

DOI: 10.1109/iedm19573.2019.8993525

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First Demonstration of CMOS Inverter and 6T-SRAM Based on GAA CFETs Structure for 3D-IC Applications

Proceedings article published in 2019 by S.-W. Chang, J.-H. Li, M.-K. Huang, Y.-C. Huang, S.-T. Huang, H.-C. Wang, Y.-J. Huang, J.-Y. Wang, L.-W. Yu, Y.-F. Huang, F.-K. Hsueh, P.-J. Sung, C.-T. Wu, W. C.-Y. Ma, K.-H. Kao and other authors.

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First Demonstration of CMOS Inverter and 6T-SRAM Based on GAA CFETs Structure for 3D-IC Applications