Published in
American Institute of Physics, Review of Scientific Instruments, 12(90), p. 123313, 2019
DOI: 10.1063/1.5128561
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The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films
Journal article published in 2019 by
Dmitry Seleznev,
Alexander Kozlov,
Timur Kulevoy 
,
Alexey Sitnikov ,
Petr Lazarenko ,
Yuri Vorobyov ,
Mikhail Smayev,
Alexey Yakubov,
Alexey Sherchenkov,
Sergey Kozyukhin
,
Alexey Sitnikov ,
Petr Lazarenko ,
Yuri Vorobyov ,
Mikhail Smayev,
Alexey Yakubov,
Alexey Sherchenkov,
Sergey Kozyukhin
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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