Abstract The superconducting CW proton linear accelerator for an Accelerator Driven Subcritical System (ADS) proposed by Japan Atomic Energy Agency (JAEA) employs elliptical cavities for the final acceleration of 180 MeV to 1.5 GeV. Since this energy region implies a changed of β from 0.55 to 1, two cavity models were developed using the geometrical betas of 0.68 and 0.89 to improve the acceleration efficiency. The study of the electromagnetic design was simulated using SUPERFISH (SF) code and python program to do variable scan, the results were benchmarked with CST Microwave Studio program (CST).