Published in
American Institute of Physics, Journal of Applied Physics, 8(125), p. 085105, 2019
DOI: 10.1063/1.5066617
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Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation
Journal article published in 2019 by
Jan K. Prüßing 
,
Gerry Hamdana,
Dominique Bougeard,
Erwin Peiner ,
Hartmut Bracht
,
Gerry Hamdana,
Dominique Bougeard,
Erwin Peiner ,
Hartmut Bracht
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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