Published in
Springer, Microsystem Technologies, 12(25), p. 4465-4474, 2019
DOI: 10.1007/s00542-019-04495-z
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Design and fabrication of a D33-mode piezoelectric micro-accelerometer
Journal article published in 2019 by
Ma-Hui Xu,
Hui Zhou,
Lin-Hui Zhu,
Jie-Nan Shen,
Yi-Bo Zeng,
Yong-Jian Feng,
Hang Guo
This paper was not found in any repository, but could be made available legally by the author.
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