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IOP Publishing, Plasma Sources Science and Technology, 11(28), p. 115008, 2019

DOI: 10.1088/1361-6595/ab4c59

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Experimental investigation of electron heating modes in capacitively coupled radio-frequency oxygen discharge

Journal article published in 2019 by S. K. Babu ORCID, S. Kelly ORCID, S. Kechkar, P. Swift, S. Daniels, M. M. Turner
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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