Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO
Journal article published in 2019 by
Vincent Garofano 
,
Remy Bérard,
Xavier Glad,
Christine Joblin ,
Kremena Makasheva ,
Luc Stafford
,
Remy Bérard,
Xavier Glad,
Christine Joblin ,
Kremena Makasheva ,
Luc Stafford
Distributing this paper is prohibited by the publisher
Full text: Unavailable
Preprint: archiving forbidden
Postprint:
archiving forbidden
Published version:
archiving forbidden
Data provided by 