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IOP Publishing, Journal of Micromechanics and Microengineering, 12(29), p. 124006, 2019

DOI: 10.1088/1361-6439/ab4e29

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Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement

Distributing this paper is prohibited by the publisher
Distributing this paper is prohibited by the publisher

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