Dissemin is shutting down on January 1st, 2025

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Optica, Optics Express, 22(27), p. 32037, 2019

DOI: 10.1364/oe.27.032037

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“Double” displacement Talbot lithography: fast, wafer-scale, direct-writing of complex periodic nanopatterns

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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