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American Chemical Society, Nano Letters, 8(19), p. 5159-5166, 2019

DOI: 10.1021/acs.nanolett.9b01525

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In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs

Journal article published in 2019 by Wenjie Lu ORCID, Younghee Lee ORCID, Jonas C. Gertsch ORCID, Jessica A. Murdzek ORCID, Andrew S. Cavanagh, Lisa Kong, Jesús A. del Alamo, Steven M. George ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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