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IOP Publishing, Chinese Physics Letters, 9(36), p. 098501, 2019

DOI: 10.1088/0256-307x/36/9/098501

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An Improved Room-Temperature Silicon Terahertz Photodetector on Sapphire Substrates

Journal article published in 2019 by Xue-Hui Lu, Cheng-Bin Jing, Lian-Wei Wang, Jun-Hao Chu
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We design and fabricate a good performance silicon photoconductive terahertz detector on sapphire substrates at room temperature. The best voltage responsivity of the detector is 6679V/W at frequency 300 GHz as well as low voltage noise of 3.8 nV/Hz1/2 for noise equivalent power 0.57 pW/Hz1/2. The measured response time of the device is about 9 μ s , demonstrating that the detector has a speed of > 110 kHz . The achieved good performance, together with large detector size (acceptance area is 3 μ m × 160 μ m ), simple structure, easy manufacturing method, compatibility with mature silicon technology, and suitability for large-scale fabrication of imaging arrays provide a promising approach to the development of sensitive terahertz room-temperature detectors.