Published in
Nature Research, Nature Nanotechnology, 9(14), p. 825-831, 2019
DOI: 10.1038/s41565-019-0506-y
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Selective area growth and stencil lithography for in situ fabricated quantum devices
Journal article published in 2019 by
Peter Schüffelgen 
,
Daniel Rosenbach,
Chuan Li,
Tobias W. Schmitt,
Michael Schleenvoigt,
Abdur R. Jalil ,
Sarah Schmitt,
Jonas Kölzer,
Meng Wang,
Benjamin Bennemann,
Umut Parlak,
Lidia Kibkalo,
Stefan Trellenkamp,
Thomas Grap,
Doris Meertens
and other authors.
,
Daniel Rosenbach,
Chuan Li,
Tobias W. Schmitt,
Michael Schleenvoigt,
Abdur R. Jalil ,
Sarah Schmitt,
Jonas Kölzer,
Meng Wang,
Benjamin Bennemann,
Umut Parlak,
Lidia Kibkalo,
Stefan Trellenkamp,
Thomas Grap,
Doris Meertens
and other authors.
This paper is made freely available by the publisher.
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