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Springer, Journal of Materials Science: Materials in Electronics, 15(30), p. 14130-14135, 2019

DOI: 10.1007/s10854-019-01779-y

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A novel three-layer graded SiGe strain relaxed buffer for the high crystal quality and strained Si0.5Ge0.5 layer epitaxial grown

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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