Published in
Elsevier, Materials Science in Semiconductor Processing, 5-6(11), p. 372-377
DOI: 10.1016/j.mssp.2008.09.005
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Diffusion and activation of phosphorus in germanium
Journal article published in 2008 by
P. Tsouroutas,
D. Tsoukalas,
I. Zergioti,
N. Cherkashin 
,
A. Claverie
,
A. Claverie
This paper was not found in any repository, but could be made available legally by the author.
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