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Microscopy of Semiconducting Materials 2003, p. 373-378, 2018

DOI: 10.1201/9781351074636-86

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Quantitative TEM analysis of structural defects in helium implanted silicon

Book chapter published in 2018 by N. Hueging, K. Tillmann, M. Luysberg ORCID, H. Trinkaus, K. Urban
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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