Published in
American Institute of Physics, Journal of Applied Physics, 22(125), p. 225709, 2019
DOI: 10.1063/1.5098307
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Exploring conductivity in ex-situ doped Si thin films as thickness approaches 5 nm
Journal article published in 2019 by
John MacHale,
Fintan Meaney,
Noel Kennedy 
,
Luke Eaton,
Gioele Mirabelli ,
Mary White,
Kevin Thomas,
Emanuele Pelucchi ,
Dirch Hjorth Petersen ,
Rong Lin,
Nikolay Petkov,
James Connolly,
Chris Hatem,
Farzan Gity ,
Lida Ansari
and other authors.
,
Luke Eaton,
Gioele Mirabelli ,
Mary White,
Kevin Thomas,
Emanuele Pelucchi ,
Dirch Hjorth Petersen ,
Rong Lin,
Nikolay Petkov,
James Connolly,
Chris Hatem,
Farzan Gity ,
Lida Ansari
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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