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Elsevier, Procedia Manufacturing, (30), p. 261-267, 2019

DOI: 10.1016/j.promfg.2019.02.038

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Evaluation of Particle Beam Lithography for Fabrication of Metallic Nano-structures

Journal article published in 2019 by Hesam Shahali, Jafar Hasan ORCID, Hongxia Wang, Tuquabo Tesfamichael, Cheng Yan ORCID, Prasad K. D. V. Yarlagadda
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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