The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films
Journal article published in 2019 by
A. Vahl 
,
J. Dittmann,
J. Jetter,
S. Veziroglu ,
S. Shree,
N. Ababii,
O. Lupan ,
O. C. Aktas,
T. Strunskus ,
E. Quandt,
R. Adelung,
S. K. Sharma,
F. Faupel
,
J. Dittmann,
J. Jetter,
S. Veziroglu ,
S. Shree,
N. Ababii,
O. Lupan ,
O. C. Aktas,
T. Strunskus ,
E. Quandt,
R. Adelung,
S. K. Sharma,
F. Faupel
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