Development of transmon qubits solely from optical lithography on 300 mm wafers
Journal article published in 2019 by
N. Foroozani,
C. Hobbs,
C. C. Hung,
S. Olson,
D. Ashworth,
E. Holland 
,
M. Malloy,
P. Kearney,
B. O’Brien,
B. Bunday,
D. DiPaola,
W. Advocate,
T. Murray,
P. Hansen,
S. Novak
and other authors.
,
M. Malloy,
P. Kearney,
B. O’Brien,
B. Bunday,
D. DiPaola,
W. Advocate,
T. Murray,
P. Hansen,
S. Novak
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
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