Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays
Journal article published in 2019 by
Artur Hermans 
,
Michiel Van Daele,
Jolien Dendooven,
Stéphane Clemmen ,
Christophe Detavernier,
Roel Baets
,
Michiel Van Daele,
Jolien Dendooven,
Stéphane Clemmen ,
Christophe Detavernier,
Roel Baets
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