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Elsevier, Sensors and Actuators A: Physical, 1(132), p. 311-316

DOI: 10.1016/j.sna.2006.06.006

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A multilayer thick-film PZT actuator for MEMs applications

Journal article published in 2006 by Nr R. Harris, M. Hill ORCID, R. Torah, R. Townsend, Sp Beeby ORCID, Nm M. White, J. Ding
This paper is available in a repository.
This paper is available in a repository.

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Abstract

This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed structures to deliver powers equivalent to bulk devices. An actuator using the multilayer screen printed technique was designed for use in an ultrasonic flow-through separator, and its successful use is reported.