Fabrication of SiO2 microcantilever arrays for mechanical loss measurements
Journal article published in 2019 by
Shinta Mariana 
,
Gerry Hamdana,
Johannes Dickmann ,
Maik Bertke,
Christophe Michel ,
Jan Meyer,
Nursidik Yulianto,
Gianpietro Cagnoli,
Erwin Peiner ,
Andreas Waag,
Massimo Granata ,
Stefanie Kroker,
Hutomo Suryo Wasisto
,
Gerry Hamdana,
Johannes Dickmann ,
Maik Bertke,
Christophe Michel ,
Jan Meyer,
Nursidik Yulianto,
Gianpietro Cagnoli,
Erwin Peiner ,
Andreas Waag,
Massimo Granata ,
Stefanie Kroker,
Hutomo Suryo Wasisto
This paper is made freely available by the publisher.
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