Pulsed plasma initiated chemical vapor deposition (PiCVD) of polymer layers − A kinetic model for the description of gas phase to surface interactions in pulsed plasma discharges
Journal article published in 2018 by
François Loyer 
,
Simon Bulou ,
Patrick Choquet ,
Nicolas D. Boscher
,
Simon Bulou ,
Patrick Choquet ,
Nicolas D. Boscher
This paper is made freely available by the publisher.
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