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Wiley, Angewandte Chemie International Edition, 49(57), p. 16224-16227, 2018

DOI: 10.1002/anie.201808586

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An N-Heterocyclic Carbene Based Silver Precursor for Plasma-Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Journal article published in 2018 by Nils Boysen ORCID, Tim Hasselmann, Sarah Karle, Detlef Rogalla ORCID, Detlef Theirich, Manuela Winter, Thomas Riedl ORCID, Anjana Devi ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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