Published in
American Institute of Physics, Review of Scientific Instruments, 12(89), p. 123702, 2018
DOI: 10.1063/1.5042463
Links
Tools
Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth
Journal article published in 2018 by
Kun Cao,
Quan Hu,
Jiaming Cai,
Miao Gong,
Jianfeng Yang,
Bin Shan,
Rong Chen 
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 